Natural patterning of templates on GaAs by formation of cracks
نویسندگان
چکیده
Natural patterning of templates on GaAs by formation of cracks Yuxin Song,1 Hao Xu,1 Yaoyao Li,1,a Mahdad Sadeghi,2 and Shumin Wang1,2,a 1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 200050, Shanghai, China 2Department of Microtechnology and Nanoscience, Chalmers University of Technology, 41296, Gothenburg, Sweden
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